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Virtual Simulation Experiment System of Magnetron Sputtering Coating

Xiaolong Zhu, Lihui Zhang, Yu Tian, Xiaodong Liu

Abstract


We have developed a virtual simulation experiment teaching system of magnetron sputtering coating, which integrates human-computer interaction, augmented reality and virtual reality into a whole, and virtualizes the whole coating experiment steps. It avoids the high investment of purchasing multiple sets of equipment, not only saves the time of training students, but also improves the efficiency, and realizes the standardization of experimental evaluation.

Keywords


Magnetron Sputtering; Coating; Virtual Simulation

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References


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4. Wang C, Li W, Wang K, et al. Study on the growth rate of anatase TiO2 thin films prepared by DC magnetron sputtering and its application in the preparation of multilayer films. Vacuum 2020; 5: 19-23.




DOI: http://dx.doi.org/10.18686/ahe.v4i11.3059

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