Virtual Simulation Experiment System of Magnetron Sputtering Coating
Abstract
We have developed a virtual simulation experiment teaching system of magnetron sputtering coating, which integrates human-computer interaction, augmented reality and virtual reality into a whole, and virtualizes the whole coating experiment steps. It avoids the high investment of purchasing multiple sets of equipment, not only saves the time of training students, but also improves the efficiency, and realizes the standardization of experimental evaluation.
Keywords
Magnetron Sputtering; Coating; Virtual Simulation
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1. Fu K, Wang J, Wang S. Effect of magnetron sputtering power on microstructure and properties of FeCrNi coating on semiconductor silicon substrate. Acta Vacuum Science and technology 2020; 10: 897-901.
2. Wang T, Zhang Y. Influence of magnetron sputtering process control mode on Cr (MO) n coating. Journal of Tianjin Vocational and Technical Normal University 2020; 3: 1-9.
3. Wei X, Gong C, Xiao J. Structure and optical properties of MoS2 thin films prepared by RF reactive magnetron sputtering. Vacuum 2020; 5: 11-13.
4. Wang C, Li W, Wang K, et al. Study on the growth rate of anatase TiO2 thin films prepared by DC magnetron sputtering and its application in the preparation of multilayer films. Vacuum 2020; 5: 19-23.
DOI: http://dx.doi.org/10.18686/ahe.v4i11.3059
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