Daily Maintenance and Common Troubleshooting of Cold Field Emission Scanning Electron Microscopy

Abstract

Scanning electron microscopy (SEM) is a large-scale precision equipment for observing and analyzing the surface morphology of materials. With the rapid development of technology, the application of scanning electron microscopy in scientifi c research, teaching, and laboratories is becoming increasingly widespread. This article provides a detailed introduction to the key operating procedures for daily maintenance of the JSM-6701F cold fi eld emission scanning electron microscope through an example, and proposes corresponding handling measures for several common faults that occur during its use and maintenance.